TY  - BOOK
AU  - Wong, Alfred Kwok-Kit,
TI  - Optical imaging in projection microlithography
SN  - 9780819458292
U1  - 621.381531 WON 
PY  - 2005///
CY  - Bellingham
PB  - SPIE Press
KW  - Applied physics
KW  - Microlithography
KW  - Imaging systems
N1  - Includes bibliographical references and index
ER  -