TY  - BOOK
AU  - Hess, Dennis W.,
AU  - Jensen, Klavs F,
TI  - Microelectronics processing: chemical engineering aspects
T2  - Advances in chemistry series,
SN  - 9780841214750
U1  - 621.381 HES 
PY  - 1989///
CY  - Washington, DC
PB  - American Chemical Society
KW  - Applied physics
KW  - Microelectronics
KW  - Integrated circuits
KW  - Surface chemistry
KW  - Materials
KW  - Design and construction
N1  - Includes index.
ER  -