Hess, Dennis W., <br/><br/>
Microelectronics processing: chemical engineering aspects 

 - Washington, DC:  American Chemical Society,  1989. 
 - xiv, 547 p:  ill;  24 cm. 
 - Advances in chemistry series,  221. .
<br/><br/> Includes index.  
<br/><br/><label>ISBN: </label>9780841214750 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Applied physics<br/>Microelectronics<br/>Integrated circuits<br/>Surface chemistry<br/>Materials<br/>Design and construction
<br/><br/><label>Dewey Class. No.: </label>621.381 HES