TY  - BOOK
AU  - Lin, Burn J.
TI  - Optical lithography : here is why
SN  - 9780819475602
U1  - 621.381531  LIN 
PY  - 2009///
CY  - Bellingham
PB  - SPIE Press
KW  - Applied physics
KW  -  Microlithography
KW  - Semiconductors --Etching
KW  - Lasers --Industrial applications
N1  - ncludes index
ER  -