TY  - BOOK
AU  - Ma, Xu,
TI  - Computational lithography
T2  - Wiley series in pure and applied optics
SN  - 9780470596975
U1  - 621.381531  MAX 
PY  - 2010///.
CY  - New York
PB  - Wiley
KW  - Applied physics
KW  - Microlithography -- Mathematics
KW  - Integrated circuits -- Design and construction -- Mathematics
KW  - Photolithography -- Mathematics
KW  - Semiconductors -- Etching -- Mathematics
KW  - Resolution (Optics)
N1  - Includes bibliographical references and index
ER  -