LevinsonHarry J. <br/><br/>
Principles of lithography   

 - 3rd ed.   
 - Bellingham  SPIE Press  c2010 
 - xiv, 503 p.:  ill. (some col.);  26cm. 
 -   
 -   .
 - Press monograph ;  198. .
<br/><br/> Includes bibliographical references and index.  
<br/><br/><label>ISBN: </label>9780819483249 
 =   
<br/><br/><label>Nat. Bib. No.: </label>  
<br/><br/><label>Nat. Bib. Agency Control No.: </label>  
<br/><br/><label>Subjects--Meeting Names: </label><br/>  
<br/><br/><label>Subjects--Index Terms: </label>Applied physics Microlithography. Integrated circuits -- Design and construction. 
<br/><br/><label>LC Class. No.: </label> /  
<br/><br/><label>Dewey Class. No.: </label>621.381531  LEV