TY  - BOOK
AU  - May, Gary S. ,
AU  - Spanos, Costas J. .,
TI  - Fundamentals of semiconductor manufacturing and process control
SN  - 9780471784067
U1  - 621.38152  MAY 
PY  - 2006///
CY  - Hoboken, NJ
PB  - Wiley &​ Sons
KW  - Applied physics
KW  - Semiconductors -- Design and construction
KW  - Integrated circuits -- Design and construction.Process control -- Statistical methods.
N1  - Includes bibliographical references and index.
ER  -