TY  - BOOK
AU  - Jaeger, Richard C. .,
TI  - Introduction to microelectronic fabrication 
T2  - Modular series on solid state devices
SN  - 9780201444940
U1  - 621.395  JAE 
PY  - 2002///
CY  - New Jersey
PB  - Prentice Hall
KW  - Applied physics
KW  - Integrated circuits -- Very large scale integration -- Design and construction -- Textbooks
N1  - Includes bibliographical references and index.
ER  -