TY  - BOOK
AU  - Franssila, Sami. .,
TI  - Introduction to microfabrication
SN  - 9780470749838
U1  - 621.381  FRA 
PY  - 2010///
CY  - Hoboken, NJ
PB  - John Wiley & Sons
KW  - Applied physics
KW  - Microelectromechanical systems
KW  - Electronic apparatus and appliances
KW  - Microfabrication
N1  - Includes bibliographical references and index.
ER  -