TY  - BOOK
AU  - Gad-el-Hak, Mohamed.,
TI  - The MEMS handbook: Design and fabrication 
T2  - Mechanical engineering series
SN  - 9780849391385
U1  - 621.381 GAD 
PY  - 2005///
CY  - Boca Raton
PB  - CRC Press
KW  - Applied physics
KW  - Microelectromechanical systems
KW  - Microelectronics.Nanotechnology.
N1  - Includes bibliographical references and index.
ER  -