Gad-el-Hak, Mohamed., <br/><br/>
The MEMS handbook: Design and fabrication    
by Mohamed Gad-el-Hak 
 - 2nd ed. .   
 - Boca Raton  CRC Press  2005 
 - 3 v. various pagings:  ill;  25cm. 
 -   
 -   .
 - Mechanical engineering series. .
<br/><br/> Includes bibliographical references and index.  
<br/><br/><label>ISBN: </label>9780849391385 
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<br/><br/><label>Subjects--Meeting Names: </label><br/>  
<br/><br/><label>Subjects--Index Terms: </label>Applied physics Microelectromechanical systems. Microelectronics.Nanotechnology.  
<br/><br/><label>LC Class. No.: </label> /  
<br/><br/><label>Dewey Class. No.: </label>621.381 GAD