Gad-el-Hak, Mohamed.,
MEMS : applications : the MEMS handbook
by Mohamed Gad-el-Hak
- 2nd ed. .
- Boca Raton: CRC Press, 2006.
- 3 v. (various pagings): ill; 27cm.
-
- .
- Mechanical engineering series. .
Includes bibliographical references and index.
9780849321061
=
Applied physics Microelectromechanical systems. Detectors. Microactuators. Robots.
/
621.381 GAD