TY  - BOOK
AU  - Iniewski, Krzysztof. .,
TI  - Integrated microsystems : electronics, photonics, and biotechnology
T2  - Devices, circuits, and systems
SN  - 9781439836200
U1  - 621.31042  INI 
PY  - 2012///
CY  - Boca Raton
PB  - CRC Press
KW  - Applied physics
KW  - Microelectromechanical systems
KW  - Integrated optics
N1  - Includes bibliographical references and index.
ER  -