TY  - BOOK
AU  - Smith, Donald L. .,
TI  - Thin-film deposition : principles and practice
SN  - 9780070585027
U1  - 621.38152 SMI 
PY  - 1995///.
CY  - New York
PB  - McGraw-Hill,
KW  - Applied physics
KW  - Thin films
KW  - Vapor-plating
KW  - Thin film devices
N1  - Includes bibliographical references and index.
ER  -