Smith, Donald L. ., <br/><br/>
Thin-film deposition : principles and practice   
by Donald L. Smith 
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 - New York:  McGraw-Hill, ,  c1995. . 
 - xxiii, 616 p.:  ill;  24cm. 
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<br/><br/> Includes bibliographical references and index.  
<br/><br/><label>ISBN: </label>9780070585027 
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<br/><br/><label>Subjects--Index Terms: </label>Applied physics Thin films. Vapor-plating. Thin film devices. 
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<br/><br/><label>Dewey Class. No.: </label>621.38152 SMI