TY  - BOOK
AU  - Madou, Marc J. .,
TI  - Fundamentals of microfabrication and nanotechnology: v.1 Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
SN  - 9781420055115
U1  - 621.38152 MAD 
PY  - 2011///.
CY  - New York
PB  - Taylor &​ Francis
KW  - Applied physics
KW  - Microelectromechanical systems
KW  - Nanoelectromechanical systems
KW  - Microfluidics
KW  - Solid state physics
N1  - Includes bibliographical references and index.
ER  -