TY  - BOOK
AU  - Grill, Alfred. .,
TI  - Cold plasma in materials fabrication : from fundamentals to applications
SN  - 0780310551 
U1  - 621.044 GRI 
PY  - 1994///.
CY  - New York
PB  - Institute of Electrical and Electronics Engineers,
KW  - Applied physics
KW  - Plasma engineering
KW  - Low temperature plasmas
KW  - Manufacturing processes
N1  - Includes bibliographical references and index.
ER  -