TY  - BOOK
AU  - Maluf, Nadim.,
AU  - Williams, Kirt. ,
TI  - Introduction to microelectromechanical systems engineering 
T2  - Microelectromechanical systems series
SN  - 9781580535908
U1  - 621.381 MAL 
PY  - 2004///.
CY  - Boston
PB  - Artech House
KW  - Applied physics
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index.
ER  -