Maluf, Nadim., <br/><br/>
Introduction to microelectromechanical systems engineering    
Nadim Maluf, Kirt Williams 
 - 2nd ed.   
 - Boston:  Artech House,   2004. . 
 - xx, 283 p. :  ill;  26cm. 
 -   
 -   .
 - Microelectromechanical systems series. .
<br/><br/> Includes bibliographical references and index.  
<br/><br/><label>ISBN: </label>9781580535908 
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<br/><br/><label>Subjects--Index Terms: </label>Applied physics Microelectromechanical systems. 
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<br/><br/><label>Dewey Class. No.: </label>621.381 MAL