TY  - BOOK
AU  - Herman, Marian A. .,
AU  - Sitter, Helmut.,
AU  - Richter, Wolfgang,
TI  - Epitaxy : physical principles and technical implementation
T2  - Springer series in materials science
SN  - 9783540678212
U1  - 621.38152 HER 
PY  - 2004///
CY  - New York
PB  - Springer
KW  - Applied physics
KW  - Epitaxy
KW  - Thin films, Multilayered -- Technique
N1  - Includes bibliographical references and index.
ER  -