TY  - BOOK
AU  - Plummer, James D.,
AU  - Griffin, Peter B. ,
AU  - Deal, Michael D. ,
TI  - Silicon VLSI technology : :  fundamentals, practice, and modeling/ 
T2  - Prentice Hall electronics and VLSI series
SN  - 9788131726044
U1  - 621.395 PLU 
PY  - 2001///
CY  - New Delhi
PB  - Pearson Education
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Design and construction
KW  - Silicon
KW  - Silicon oxide films
KW  - Metal oxide semiconductors
N1  - Includes bibliographical references and index.; Includes bibliographical references and index
ER  -