Fabrication engineering at the micro and nanoscale

By:

Campbell, Stephen A

Series: The Oxford Series in Electrical and Computer EngineeringPublication details: Oxford: Oxford University Press, 2013.Edition: 4th edDescription: xiv, 671 p.: ill.; pbk.: 24 cmISBN:

9780199861224

Subject(s):

DDC classification:

621.38152 CAM

Summary: Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices. With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes. https://global.oup.com/academic/product/fabrication-engineering-at-the-micro--and-nanoscale-9780199861224?cc=in&lang=en&#

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Holdings
Item type	Current library	Collection	Call number	Copy number	Status	Date due	Barcode
Books	IIT Gandhinagar	General	621.38152 CAM (Browse shelf(Opens below))	1	Checked out	15/05/2026	035751

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Previous	621.3815 ZBA Basic electronics :	621.38152 BAL Progress in SOI structures and devices operating at extreme conditions	621.38152 BAL Wide bandgap semiconductor power devices: materials, physics, design and applications	621.38152 CAM Fabrication engineering at the micro and nanoscale	621.38152 CHE Semiconductor packaging: materials interaction and reliability	621.38152 DUT Semiconductor devices and circuits	621.38152 GRE Semiconductor quantum dots: organometallic and inorganic synthesis	Next

Includes Appendix and Index

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

https://global.oup.com/academic/product/fabrication-engineering-at-the-micro--and-nanoscale-9780199861224?cc=in&lang=en&#

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