Principles of lithography

By:

LevinsonHarry J

Material type: Book

BookSeries: ; | Press monograph ; 198.Current publication frequency: .Publication details: Bellingham SPIE Press c2010Edition: 3rd edDescription: xiv, 503 p.: ill. (some col.); 26cmISBN:

9780819483249

Subject(s):

DDC classification:

621.381531 LEV

LOC classification:

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Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	IIT Gandhinagar	General	621.381531 LEV (Browse shelf(Opens below))	Available		011573

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Previous	621.317 JAI Power electronics: devices, circuits and MATLAB simulations	621.317 JAI Power electronics: devices, circuits and MATLAB simulations	621.317 JAI Power electronics: devices, circuits and MATLAB simulations	621.381531 LEV Principles of lithography	621.381531 MAC Fundmanetal principles of optical lithography: the science of microfabrication	621.381531 MAX Computational lithography	621.38152 ORT Story of semiconductors	Next

Includes bibliographical references and index.

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