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Fundamentals of semiconductor manufacturing and process control by Gary S. May and Costas J. Spanos

By: Contributor(s): Material type: BookBookSeries: ; Current publication frequency: .Publication details: Hoboken, NJ: Wiley &​ Sons, 2006.Edition: Description: xix, 463 p. : 25cmISBN:
  • 9780471784067
Subject(s): DDC classification:
  • 621.38152 MAY
LOC classification:
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