Fundamentals of microfabrication and nanotechnology: v.3 from MEMS ti Bio-MEMS and Bio NEMS by Marc J.Madou

By:

Madou, Marc J

Material type: Book

BookSeries: ; Current publication frequency: .Publication details: New York: CRC, , c2012. .Edition: 3rd edDescription: 3v.: ill. (some col.) ; 29cmISBN:

9781420055160

Subject(s):

Applied physics
Integrated circuits -- Design and construction
Microelectromechanical systems -- Design and construction
Nanostructured materials -- Design and construction

DDC classification:

621.38152 MAD

LOC classification:

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Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	IIT Gandhinagar General Stacks	General	621.38152 MAD (Browse shelf(Opens below))	Available		009108

Includes bibliographical references and index.

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