Fundamentals of microfabrication and nanotechnology: v.1 Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology by Marc J.Madou

By:

Madou, Marc J

Material type: Book

BookSeries: ; Current publication frequency: .Publication details: New York: Taylor & Francis, 2011. .Edition: 3rd edDescription: v.p.: ill; 29cmISBN:

9781420055115

Subject(s):

Applied physics
Microelectromechanical systems
Nanoelectromechanical systems
Microfluidics
Solid state physics

DDC classification:

621.38152 MAD

LOC classification:

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Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	IIT Gandhinagar General Stacks	General	621.38152 MAD (Browse shelf(Opens below))	Available		009106

Includes bibliographical references and index.

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