Atomic layer deposition: principles, characteristics, and nanotechnology applications (Record no. 62942)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01432nam a2200277 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9781118747421 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 KAA |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Kaariainen, Tommi |
| 245 ## - TITLE STATEMENT | |
| Title | Atomic layer deposition: principles, characteristics, and nanotechnology applications |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | Wiley, |
| Date of publication, distribution, etc. | 2024. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes index |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc. | Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Circuits |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Dielectrics |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Engineered Materials |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Devices and Systems |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Nanotechnology |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Manufacturing technology |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | IEEE-Wiley Semiconductor Ebooks |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Cameron, David |
| Relator term | Co author |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kaariainen, Marja-Leena |
| Relator term | Co author |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Sherman, Arthur |
| Relator term | Co author |
| 856 ## - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | <a href="https://ieeexplore.ieee.org/servlet/opac?bknumber=10513451">https://ieeexplore.ieee.org/servlet/opac?bknumber=10513451</a> |
| Link text | Click here to access e-book |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | Dewey Decimal Classification |
| Koha item type | E- Books |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Materials specified (bound volume or other part) | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Date last seen | Uniform Resource Identifier | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Dewey Decimal Classification | IEEE-Wiley Semiconductor Ebooks | IIT Gandhinagar | IIT Gandhinagar | 13/06/2025 | 621.38152 KAA | 13/06/2025 | https://ieeexplore.ieee.org/servlet/opac?bknumber=10513451 | 13/06/2025 | E- Books |
