Microelectronics processing: chemical engineering aspects (Record no. 32771)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00725nam a2200241 454500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 160319b1989 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780841214750 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 HES |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Hess, Dennis W., |
| 245 ## - TITLE STATEMENT | |
| Title | Microelectronics processing: chemical engineering aspects |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | Washington, DC: |
| Name of publisher, distributor, etc | American Chemical Society, |
| Date of publication, distribution, etc | 1989. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xiv, 547 p: |
| Other physical details | ill; |
| Dimensions | 24 cm. |
| 490 ## - SERIES STATEMENT | |
| Series statement | Advances in chemistry series, |
| Volume number/sequential designation | 221. |
| 500 ## - GENERAL NOTE | |
| General note | Includes index. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Applied physics |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Microelectronics |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Integrated circuits |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Surface chemistry |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Materials |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Design and construction |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Jensen, Klavs F, |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | Dewey Decimal Classification |
| Item type | Books |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Date acquired | Source of acquisition | Cost, normal purchase price | Total Checkouts | Full call number | Barcode | Date last seen | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Dewey Decimal Classification | IIT Gandhinagar | IIT Gandhinagar | 21/12/2012 | Himanshu Book Co. | 2980.60 | 621.381 HES | 013238 | 02/02/2016 | Books |
