Optical lithography : here is why (Record no. 31615)
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| fixed length control field | 00885nam a2200373 454500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 160319bc2009. xxu||||| |||| 00| 0 eng d |
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| 016 ## - NATIONAL BIBLIOGRAPHIC AGENCY CONTROL NUMBER | |
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| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780819475602 |
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| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381531 LIN |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Lin, Burn J. |
| 222 ## - KEY TITLE | |
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| 245 ## - TITLE STATEMENT | |
| Title | Optical lithography : here is why |
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| 250 ## - EDITION STATEMENT | |
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| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
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| Place of publication, distribution, etc. | Bellingham: |
| Name of publisher, distributor, etc. | SPIE Press, |
| Date of publication, distribution, etc. | c2009. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xiv, 477 p. : |
| Other physical details | ill. ; |
| Dimensions | 26 cm. |
| 310 ## - CURRENT PUBLICATION FREQUENCY | |
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| 500 ## - GENERAL NOTE | |
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| General note | ncludes index. |
| 611 ## - SUBJECT ADDED ENTRY--MEETING NAME | |
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| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Applied physics |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Microlithography. |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Semiconductors --Etching |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Lasers --Industrial applications |
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| Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Cost, normal purchase price | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| IIT Gandhinagar | IIT Gandhinagar | 26/07/2012 | Kushal Books | 4748.00 | 621.381531 LIN | 012018 | 24/03/2016 | 02/02/2016 | Books |
