Hotspot detection in lithographic patterns using machine learning technique
Dawar, Rohit
Hotspot detection in lithographic patterns using machine learning technique - Gandhinagar : Indian Institute of Technology, 2018 - ix, 69 p. : ill. ; 30 cm.
Including bibliography details
Electrical Engineering
Hotspot
Lithographic
Machine
Micro Lithography
621.763 / DAW
Hotspot detection in lithographic patterns using machine learning technique - Gandhinagar : Indian Institute of Technology, 2018 - ix, 69 p. : ill. ; 30 cm.
Including bibliography details
Electrical Engineering
Hotspot
Lithographic
Machine
Micro Lithography
621.763 / DAW