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Foundations of MEMS

Liu, Chang.,

Foundations of MEMS by Chang Liu and Anil V. Nandi - - Upper Saddle River, N.J: Prentice Hall, 2012. - xiv, 562 p.: ill; 24cm. - - .

Includes bibliographical references and index.

ISBN: 9780132497367 =

Nat. Bib. No.:

Nat. Bib. Agency Control No.:

Subjects--Meeting Names:

Subjects--Index Terms: Applied physics Microelectromechanical systems.

LC Class. No.: /

Dewey Class. No.: 621.381 LIU

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