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The MEMS handbook: Design and fabrication

Gad-el-Hak, Mohamed.,

The MEMS handbook: Design and fabrication by Mohamed Gad-el-Hak - 2nd ed. . - Boca Raton CRC Press 2005 - 3 v. various pagings: ill; 25cm. - - . - Mechanical engineering series. .

Includes bibliographical references and index.

ISBN: 9780849391385 =

Nat. Bib. No.:

Nat. Bib. Agency Control No.:

Subjects--Meeting Names:

Subjects--Index Terms: Applied physics Microelectromechanical systems. Microelectronics.Nanotechnology.

LC Class. No.: /

Dewey Class. No.: 621.381 GAD

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