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Cold plasma in materials fabrication : from fundamentals to applications

Grill, Alfred. .,

Cold plasma in materials fabrication : from fundamentals to applications by Alfred Grill - - New York: Institute of Electrical and Electronics Engineers, , c1994. . - xiii, 257 p.: ill; 24cm. - - .

Includes bibliographical references and index.

ISBN: 0780310551 =

Nat. Bib. No.:

Nat. Bib. Agency Control No.:

Subjects--Meeting Names:

Subjects--Index Terms: Applied physics Plasma engineering. Low temperature plasmas. Manufacturing processes.

LC Class. No.: /

Dewey Class. No.: 621.044 GRI

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